Vacuum chamber infrared heater
Ditch the Hot Air: Why Vacuum IR is the Way to Go If you’re still using hot air circulation for semiconductor processing, you’ve probably...
Vacuum compatible infrared heater
On a 300mm line, a half-degree drift during the photoresist bake is enough to throw linewidths off and scrap a whole lot. That’s the world we built...
Vacuum oven heating element fab
On the fab floor, photoresist bake isn’t a warm-up. It’s the hinge on the process. Let the soft bake or hard bake drift by 1.5°C and you’ll see it in...