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Below you will find pages that utilize the taxonomy term “Vacuum”
Vacuum chamber infrared heater

Vacuum chamber infrared heater

Ditch the Hot Air: Why Vacuum IR is the Way to Go If you’re still using hot air circulation for semiconductor processing, you’ve probably...
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Vacuum compatible infrared heater

Vacuum compatible infrared heater

On a 300mm line, a half-degree drift during the photoresist bake is enough to throw linewidths off and scrap a whole lot. That’s the world we built...
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Vacuum oven heating element fab

Vacuum oven heating element fab

On the fab floor, photoresist bake isn’t a warm-up. It’s the hinge on the process. Let the soft bake or hard bake drift by 1.5°C and you’ll see it in...
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